Polyurethane (PU) Polishing Pad for Wafer Surface

Polyurethane (PU) Polishing Pad for Wafer Surface

Polyurethane (PU) Polishing Pad

Polishing and finishing of glass, LCD/LED substrates, precision optics, hard disk, metal and semiconductor wafer surfaces

Model: MSH-110, MSH-120, MSH-130, MSH-210, MSH-230

Thickness: 0.02" (0.508 mm) - 0.20" (5.08 mm)

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Product Details

According to the different application fields of different polishing pads, optical products are divided into 4 categories:

♦ Ordinary optics, such as touch screen glass (including Windows glass, mobile phone glass, PAD, LCD glass can also fall into this category)
♦ Precision optics, all kinds of optical lenses, prisms, quartz glass, filters (blue glass), collimators
♦ Gallium arsenide, silicon carbide, sapphire substrate and epitaxial wafers, semiconductor wafers, and precision ceramics (zirconia ceramics, aluminum nitride ceramics)
♦ Infrared laser (such as this year's epidemic, the infrared industry is very hot, temperature control gun use is large)

pu polishing pad

wafer polishing

Drawing&Specification

Thickness For Polyurethane Polishing Pad

Standard thickness for PU polishing pads ranges from 0.020 inches (0.508 mm) to 0.20 inch (5.08 mm)

Model	Filler	Average Density G / cm³ (Ib / ft³ ）	Average Hardness shore - A	Application Area
MSH- 110	cerium oxide	0.42 (26)	78	Glass Crystal Metal Ceramic
MSH- 120	cerium oxide	0.43 (27)	78	Glass Crystal
MSH- 130	cerium oxide	0.35 (22)	66	Glass Crystal
MSH- 210	zirconium oxide	0.59 (37)	90	Glass Metal Ceramic
MSH- 230	zirconium oxide	0.40 (25)	74	Glass Crystal
MSH- 240	zirconium oxide	0.57 (36)	88	Glass Crystal
MSH- 410	none	0.51 (32)	88	Glass Metal Ceramic Crystal
MSH- 420	none	0.77 (49)	96	Glass Metal Ceramic Crystal

Specifications of pu polishing pad

Shape	Dimensions (inches / mm)
Rectangle	23 x 55 "	584.2 x 1397 mm
Rectangle	36 x 71 "	914 x 1803 mm
Square	42 x 42 "	1066 x 1066 mm
Square	52 x 52 "	1320 x 1320 mm
Roundness	φ 26 "	660 mm
	φ 32 "	812 mm
	φ 38 "	965 mm
	φ 52 "	1320 mm
Custom sizes, shapes and configurations are available